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微焊接扫描电镜


产品描述
       Serontech  developed electron beam welder for micro joining first ever in the world in 2005. This new concept raised a great sensation in the academic conference after announcement. It is applications various especially in the fine welding under sub-micron scale.

APPLICATION
§ E-beam Micro Joining with surface cleanness
§ Quality welding of metal with high reflexibility Ag, Cu, etc.
§ Metal with high melting point W, Ti etc
§ Fine and complicated structure SOS (System on Chip), Precision Valve
§ Wetting/Joining for Gas Sensor
§ Precision parts welding for Aircraft, Automobile industry, Aerospace and Power Engineering.

FEATURES
§ Low Power & High Performance
§ fast response system for preventing weld
§ defects due to gun discharges,
§ high weld quality and welding process repeatability, possibility of gun mounting on a robotic manipulator.
§ Max. 35KeV Voltage Power
§ Max. 50㎂ Beam Current
§ Novel Seam Tracking for NANO Size

SPECIFICATIONS
Cathode Type   Tungsten Hair pin type
HV Power Supply Source Vacc. : ~35KeV(Max.)
Probe beam Current A few pA ~ 35uA
(Ultra High Current Density) 50uA (Max. Performance)
Neutralizer Plate Thermal Electron Ground
Faraday Cage & Meter:            ~ Micro Ampere
Magnetic Lens System Condenser & Objective
Scan System 3 types of Scan mode
Detector BSE Detector
Vacuum System R.P(2) + TMP
Manual & Auto Control
Stage Micro Stage



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